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Home » Research Topics » Application Areas » Functional Materials and Devices » MEMS and MOEMS
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MEMS and MOEMS
Atomic layer deposition for MOEMS and MEMS applications

Due to the high conformality, excellent thickness control, availability of dense and pinhole free films of different materials at low deposition temperature and low cost, atomic layer deposition (...

Research Topics

  • Application Areas
    • Micro/Nano Electronics
      • Devices for Classic and Quantum Information Storage and Processing
    • Functional Materials and Devices
      • MEMS and MOEMS
      • Functional Nanostructured Materials
  • Technological Areas
    • Micro/Nano Fabrication
    • Characterizations
    • Theoretical Modelling

The IMM, belonging to the Physics and Matter Technologies Department of CNR, is organized in 5 Units and one Headquarters.

Units in Italy

  • IMM
  • Agrate UNIT
  • Bologna UNIT
  • Catania HQ
  • Catania UNIT
  • Lecce UNIT
  • Rome UNIT

Contact info

CNR Institute for Microelectronics and Microsystems

Unit of Agrate Brianza

  • 20864 - Agrate Brianza (MB) , Italy - via C. Olivetti, 2
  • Deputy Director: Graziella Tallarida
  • (+39) 039 603 59 77
  • (+39) 039 688 11 75
  • info@mdm.imm.cnr.it

Link utili

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Unit of the Institute for Microelectronics and Microsystems.