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  • Surface micromachining process for manufacturing electro-acoustic transducers, particularly ultrasonic transducers, obtained transducers and intermediate products

    Vittorio Foglietti, Elena Cianci, Daniele Memmi, Giosué Caliano, Massimo Pappalardo

    2006-07-11

    Biblio references:

    Origin: US7074634

  • Process for physical vapor deposition of a chalcogenide material layer and chamber for physical vapor deposition of a chalcogenide material layer of a phase change memory device

    Maria Marangon, Paola Besana, Raimondo Cecchini, Mauro Tresoldi

    2006-04-05

    Biblio references:

    Origin: US20060249369

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