-A A +A
Sequential infiltration synthesis (SIS) provides a successful route to grow inorganic materials into polymeric films by penetrating of gaseous precursors into the polymer, both in order to enhance the functional properties of the polymer creating an organic–inorganic hybrid material, and to fabricate inorganic nanostructures when infiltrating in patterned polymer films or in self‐assembled block copolymers. A SIS process consists in a controlled sequence of metal–organic precursor and coreactant vapor exposure cycles of the polymer films in an evacuated reactor. Here, a study of the SIS process of alumina using trimethylaluminum (TMA) and H2O in various polymer films using in situ dynamic spectroscopic ellipsometry (SE) is reported. In situ dynamic SE enables time‐resolved monitoring of the polymer swelling, which is relevant to the diffusion and retains the metal precursor into the polymer itself. Diffusion …
Publication date: 
1 Oct 2018
Biblio References: 
Volume: 5 Issue: 20 Pages: 1801016
Advanced Materials Interfaces