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X-ray reflectometry (XRR) is a well established technique to evaluate quantitatively electron density, thickness and roughness of thin layers. In this paper, results of the first world-wide XRR round-robin experiment, involving 20 laboratories, are presented and discussed. The round-robin experiment was performed within the framework of the VAMAS Project `X-ray reflectivity measurements for evaluation of thin films and multilayers', the aim of which is to produce a `good practice' manual for XRR. The reproducibility of measurements obtained using different equipment has been investigated. The influence of the fitting of the experimental data was shown to be non-negligible compared with the experimental factors. The dynamic intensity range proves to be an important parameter for obtaining a good quality measurement. A simpler test sample which does not develop a surface oxide layer over time is now the subject …
International Union of Crystallography
Publication date: 
1 Feb 2008

P Colombi, DK Agnihotri, VE Asadchikov, E Bontempi, DK Bowen, C-H Chang, LE Depero, M Farnworth, T Fujimoto, A Gibaud, M Jergel, M Krumrey, TA Lafford, A Lamperti, T Ma, RJ Matyi, M Meduna, S Milita, K Sakurai, L Shabel'Nikov, A Ulyanenkov, A Van der Lee, C Wiemer

Biblio References: 
Volume: 41 Issue: 1 Pages: 143-152
Journal of Applied Crystallography